Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11410832 | RF measurement system and method | Merritt Funk, Yohei Yamazawa, Barton Lane | 2022-08-09 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Barton Lane, Peter Ventzek, Justin Moses | 2022-07-19 |