Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11521834 | Plasma processing systems and methods for chemical processing a substrate | Alok Ranjan, Mitsunori Ohata | 2022-12-06 |
| 11430643 | Quantification of processing chamber species by electron energy sweep | Jianping Zhao, Charles Schlechte, Michael Hummel | 2022-08-30 |
| 11393662 | Apparatuses and methods for plasma processing | Zhiying Chen, Joel Blakeney, Megan Carruth, Alok Ranjan, Kazuya Nagaseki | 2022-07-19 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Alok Ranjan, Barton Lane, Justin Moses, Chelsea DuBose | 2022-07-19 |
| 11348761 | Impedance matching apparatus and control method | John Carroll, Jianping Zhao, Barton Lane | 2022-05-31 |
| 11342195 | Methods for anisotropic etch of silicon-based materials with selectivity to organic materials | Yun Han, Alok Ranjan | 2022-05-24 |
| 11295937 | Broadband plasma processing systems and methods | Jianping Zhao | 2022-04-05 |
| 11264212 | Ion angle detector | Zhiying Chen, Joel Blakeney, Megan Carruth, Alok Ranjan | 2022-03-01 |
| 11257685 | Apparatus and process for electron beam mediated plasma etch and deposition processes | Alok Ranjan | 2022-02-22 |
| 11251021 | Mode-switching plasma systems and methods of operating thereof | Alok Ranjan, Mitsunori Ohata, Michael Hummel | 2022-02-15 |