Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430643 | Quantification of processing chamber species by electron energy sweep | Jianping Zhao, Peter Ventzek, Michael Hummel | 2022-08-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11430643 | Quantification of processing chamber species by electron energy sweep | Jianping Zhao, Peter Ventzek, Michael Hummel | 2022-08-30 |