Issued Patents 2022
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11527413 | Cyclic plasma etch process | Yun Han, Peter L. G. Ventzek | 2022-12-13 |
| 11521834 | Plasma processing systems and methods for chemical processing a substrate | Peter Ventzek, Mitsunori Ohata | 2022-12-06 |
| 11470712 | Plasma processing apparatus | Yohei Yamazawa, Takehisa Saito, Mayo UDA, Keigo Toyoda, Toshiki Nakajima | 2022-10-11 |
| 11398386 | Plasma etch processes | Yusuke Yoshida, Sergey Voronin, Shyam Sridhar, Caitlin Philippi, Christopher Talone | 2022-07-26 |
| 11393663 | Methods and systems for focus ring thickness determinations and feedback control | Merritt Funk, Barton Lane, Peter Ventzek, Justin Moses, Chelsea DuBose | 2022-07-19 |
| 11393662 | Apparatuses and methods for plasma processing | Zhiying Chen, Joel Blakeney, Megan Carruth, Peter Ventzek, Kazuya Nagaseki | 2022-07-19 |
| 11342195 | Methods for anisotropic etch of silicon-based materials with selectivity to organic materials | Yun Han, Peter Ventzek | 2022-05-24 |
| 11264212 | Ion angle detector | Zhiying Chen, Joel Blakeney, Megan Carruth, Peter Ventzek | 2022-03-01 |
| 11257685 | Apparatus and process for electron beam mediated plasma etch and deposition processes | Peter Ventzek | 2022-02-22 |
| 11251021 | Mode-switching plasma systems and methods of operating thereof | Peter Ventzek, Mitsunori Ohata, Michael Hummel | 2022-02-15 |