Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508603 | Substrate placing table and substrate processing apparatus | Naoyuki Satoh, Tatsuo Nishita | 2022-11-22 |
| 11227786 | Method of manufacturing electrostatic chuck and electrostsatic chuck | Yoshiyuki Kobayashi, Kazuya Nagaseki | 2022-01-18 |
| 11217470 | Substrate placing table and substrate processing apparatus | Naoyuki Satoh, Tatsuo Nishita | 2022-01-04 |