Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508603 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Naoyuki Satoh | 2022-11-22 |
| 11217470 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Naoyuki Satoh | 2022-01-04 |