Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11508603 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2022-11-22 |
| 11434174 | Member for plasma processing apparatus, plasma processing apparatus with the same and method for using sintered body | Takashi Ikeda, Hajime Ishii, Kenji Fujimoto, Nobuyuki Nagayama, Koichi Murakami +1 more | 2022-09-06 |
| 11402198 | Information processing device, biological information measurement device, and computer-readable medium | — | 2022-08-02 |
| 11217470 | Substrate placing table and substrate processing apparatus | Satoshi Taga, Tatsuo Nishita | 2022-01-04 |