Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476089 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2022-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476089 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Shinji Kubota, Koji Maruyama, Takashi Dokan | 2022-10-18 |