Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11476089 | Control method and plasma processing apparatus | Chishio Koshimizu, Taichi Hirano, Toru HAYASAKA, Shinji Kubota, Koji Maruyama | 2022-10-18 |
| 11337297 | Plasma processing method and plasma processing apparatus | Shinji Kubota, Chishio Koshimizu | 2022-05-17 |
| 11282701 | Plasma processing method and plasma processing apparatus | Shinji Kubota | 2022-03-22 |