Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517943 | Cleaning method and substrate processing apparatus | Kyoko Ikeda | 2022-12-06 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 11446714 | Processing apparatus and processing method, and gas cluster generating apparatus and gas cluster generating method | Chishio Koshimizu | 2022-09-20 |
| 11450506 | Pattern enhancement using a gas cluster ion beam | Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Matthew C. Gwinn, Luis Fernandez +3 more | 2022-09-20 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2022-03-08 |