Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11482455 | Cutting method of workpiece by forming reformed region and dry etching process | Toshiki Manabe, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-10-25 |
| 11380586 | Cutting method | Toshiki Manabe, Koichi Izumi, Tadashi Shojo, Takafumi OGIWARA, Takeshi Sakamoto | 2022-07-05 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Takehiko Orii, Yukimasa Saito, Kunihiko Koike, Koichi Izumi +3 more | 2022-03-08 |