Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Keiji Tanouchi, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
| 11267021 | Gas cluster processing device and gas cluster processing method | Kazuya Dobashi, Yukimasa Saito, Kunihiko Koike, Takehiko Senoo, Koichi Izumi +3 more | 2022-03-08 |