Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11367630 | Substrate cleaning method, substrate cleaning system, and memory medium | Miyako Kaneko, Takehiko Orii, Itaru Kanno, Meitoku Aibara, Satoru Tanaka | 2022-06-21 |