Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11517943 | Cleaning method and substrate processing apparatus | Kazuya Dobashi | 2022-12-06 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kazuya Dobashi, Tsunenaga Nakashima, Kenji Sekiguchi, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME | 2022-03-22 |