Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11393696 | Method of controlling substrate treatment apparatus, substrate treatment apparatus, and cluster system | — | 2022-07-19 |
| 11281116 | Substrate stage and substrate processing apparatus | Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |