Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466365 | Film-forming apparatus | Toshiaki Fujisato, Yuichi FURUYA | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Yuichi FURUYA, Toshiaki Fujisato | 2022-09-13 |
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Takashi Mochizuki, Kouki Suzuki, Hwajun Noh | 2022-07-26 |
| 11280002 | Placement apparatus and processing apparatus | Kohichi Satoh, Toshiaki Fujisato | 2022-03-22 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Satoshi Yonekura, Satoshi Takeda, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |