Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Daisuke Toriya, Kouki Suzuki, Hwajun Noh | 2022-07-26 |
| 11393911 | Method of manufacturing semiconductor device and semiconductor device | Teppei Takahashi, Tetsuto Inoue, Akihiko Sugai, Shunichi Nakamura | 2022-07-19 |