Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466365 | Film-forming apparatus | Daisuke Toriya, Yuichi FURUYA | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Daisuke Toriya, Yuichi FURUYA | 2022-09-13 |
| 11396704 | Substrate holder and film forming apparatus | Takashi Mochizuki, Daisuke Toriya, Kouki Suzuki, Hwajun Noh | 2022-07-26 |
| 11280002 | Placement apparatus and processing apparatus | Kohichi Satoh, Daisuke Toriya | 2022-03-22 |