Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11466365 | Film-forming apparatus | Daisuke Toriya, Toshiaki Fujisato | 2022-10-11 |
| 11441224 | Method of controlling substrate processing apparatus, and substrate processing apparatus | Daisuke Toriya, Toshiaki Fujisato | 2022-09-13 |
| 11306847 | Valve device, processing apparatus, and control method | Tomohisa KIMOTO, Takashi Kakegawa, Eiichi KOMORI, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |