Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506321 | Pipe heating device and substrate processing apparatus | Eiichi KOMORI | 2022-11-22 |
| 11306847 | Valve device, processing apparatus, and control method | Yuichi FURUYA, Takashi Kakegawa, Eiichi KOMORI, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |