Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11506321 | Pipe heating device and substrate processing apparatus | Tomohisa KIMOTO | 2022-11-22 |
| 11306847 | Valve device, processing apparatus, and control method | Tomohisa KIMOTO, Yuichi FURUYA, Takashi Kakegawa, Hideaki Fujita, Hiroyuki Mori | 2022-04-19 |
| 11286563 | Substrate processing apparatus, substrate processing system, and substrate processing method | — | 2022-03-29 |
| 11236425 | Method of processing substrate | Kennan Mo, Nuri CHOI, Kouichi SEKIDO, Katsumasa Yamaguchi | 2022-02-01 |