Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Takashi Mochizuki, Daisuke Toriya, Hwajun Noh | 2022-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396704 | Substrate holder and film forming apparatus | Toshiaki Fujisato, Takashi Mochizuki, Daisuke Toriya, Hwajun Noh | 2022-07-26 |