Issued Patents 2022
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531269 | Method for producing resist pattern coating composition with use of solvent replacement method | Shuhei Shigaki, Wataru SHIBAYAMA, Makoto Nakajima, Rikimaru Sakamoto | 2022-12-20 |
| 11517809 | Game device, program product, game system and article for games | Wataru Higuchi, Reina FUKUOKA, Yuki KADOTA, Kenichiro Kobayashi | 2022-12-06 |
| 11488824 | Method for manufacturing semiconductor device using silicon-containing resist underlayer film forming composition for solvent development | Makoto Nakajima, Yuta Kanno, Hiroyuki Wakayama | 2022-11-01 |
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Motoshi FUKUDOME, Kyoko Ikeda | 2022-03-22 |
| 11215927 | Substrate treating composition and method for fabricating a semiconductor device using the same | Ju Young Kim, Hyunwoo KIM, Makoto Nakajima, Shuhei Shigaki, Wataru SHIBAYAMA | 2022-01-04 |