Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531269 | Method for producing resist pattern coating composition with use of solvent replacement method | Shuhei Shigaki, Satoshi Takeda, Makoto Nakajima, Rikimaru Sakamoto | 2022-12-20 |
| 11392037 | Resist underlayer film forming composition containing silicone having cyclic amino group | Makoto Nakajima, Yuta Kanno | 2022-07-19 |
| 11281104 | Alkaline developer soluable silicon-containing resist underlayer film-forming composition | Makoto Nakajima | 2022-03-22 |
| 11215927 | Substrate treating composition and method for fabricating a semiconductor device using the same | Ju Young Kim, Hyunwoo KIM, Makoto Nakajima, Satoshi Takeda, Shuhei Shigaki | 2022-01-04 |