Issued Patents 2022
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11531269 | Method for producing resist pattern coating composition with use of solvent replacement method | Satoshi Takeda, Wataru SHIBAYAMA, Makoto Nakajima, Rikimaru Sakamoto | 2022-12-20 |
| 11479627 | Film forming composition containing fluorine-containing surfactant | Makiko Umezaki, Ryo Karasawa, Ryuta MIZUOCHI | 2022-10-25 |
| 11459414 | Film forming composition containing fluorine-containing surfactant | Makiko Umezaki, Ryo Karasawa, Ryuta MIZUOCHI | 2022-10-04 |
| 11215927 | Substrate treating composition and method for fabricating a semiconductor device using the same | Ju Young Kim, Hyunwoo KIM, Makoto Nakajima, Satoshi Takeda, Wataru SHIBAYAMA | 2022-01-04 |