Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11488824 | Method for manufacturing semiconductor device using silicon-containing resist underlayer film forming composition for solvent development | Satoshi Takeda, Makoto Nakajima, Yuta Kanno | 2022-11-01 |
| 11440985 | Underlayer film-forming composition for use in forming a microphase-separated pattern | Ryuta MIZUOCHI, Yasunobu Someya, Rikimaru Sakamoto | 2022-09-13 |