Issued Patents 2022
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Kyoko Ikeda | 2022-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11281116 | Substrate stage and substrate processing apparatus | Einosuke Tsuda, Daisuke Toriya, Satoshi Yonekura, Satoshi Takeda, Kyoko Ikeda | 2022-03-22 |