Issued Patents 2022
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11538679 | Substrate processing method and substrate processing apparatus | Yuji Katagiri | 2022-12-27 |
| 11504751 | Substrate cleaning method, processing container cleaning method, and substrate processing device | Kyoko Ikeda, Kazuya Dobashi, Tsunenaga Nakashima, Shuuichi Nishikido, Masato Nakajo +1 more | 2022-11-22 |
| 11306249 | Substrate processing method, substrate processing device and etching liquid | Koukichi Hiroshiro, Tetsuya Sakazaki, Koji Kagawa, Kazuyoshi Mizumoto | 2022-04-19 |