KK

Koji Kagawa

TL Tokyo Electron Limited: 1 patents #304 of 896Top 35%
Overall (2022): #370,162 of 548,613Top 70%
1
Patents 2022

Issued Patents 2022

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11306249 Substrate processing method, substrate processing device and etching liquid Koukichi Hiroshiro, Tetsuya Sakazaki, Kenji Sekiguchi, Kazuyoshi Mizumoto 2022-04-19