Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443920 | Plasma processing apparatus | Tatsuo Matsudo, Chishio Koshimizu | 2022-09-13 |
| 11315765 | Plasma processing apparatus and plasma processing method | Chishio Koshimizu, Tatsuo Matsudo | 2022-04-26 |