Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11443952 | Etching method and etching device | Shuichiro Uda, Takeshi Saito, Taiki KATO | 2022-09-13 |
| 11328904 | Substrate processing apparatus | Shigeki Doba, Hiroyuki Ogawa, Hajime Naito, Tatsuo Matsudo | 2022-05-10 |