Issued Patents 2022
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11396703 | Apparatus and methods for improving chemical utilization rate in deposition process | Kevin Griffin, Sanjeev Baluja, Joseph AuBuchon, Mario David Silvetti | 2022-07-26 |
| 11282676 | Paired dynamic parallel plate capacitively coupled plasmas | Tsutomu Tanaka, Mandyam Sriram, Dmitry A. Dzilno, Sanjeev Baluja, Mario David Silvetti | 2022-03-22 |