Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sumit Agarwal, Sanjeev Baluja, Michael R. Rice | 2022-05-17 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sumit Agarwal, Sanjeev Baluja, Michael R. Rice | 2022-05-17 |