Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11371148 | Fabricating a recursive flow gas distribution stack using multiple layers | Anantha K. Subramani, Yang Guo, Siva Chandrasekar | 2022-06-28 |
| 11332827 | Gas distribution plate with high aspect ratio holes and a high hole density | Sanjeev Baluja, Chad Peterson, Michael R. Rice | 2022-05-17 |