| 10879094 |
Electrostatic chucking force measurement tool for process chamber carriers |
Gautam Pisharody, Seshadri Ramaswami, Shambhu N. Roy, Niranjan Kumar |
2020-12-29 |
| 10858727 |
High density, low stress amorphous carbon film, and process and equipment for its deposition |
Jingjing Liu, Zhong Qiang Hua, Adolph Miller Allen, Michael W. Stowell, Chentsau Ying +3 more |
2020-12-08 |
| 10847360 |
High pressure treatment of silicon nitride film |
Keith Tatseun Wong, Sean S. Kang, Ellie Yieh |
2020-11-24 |
| 10825665 |
Directional treatment for multi-dimensional device processing |
Ludovic Godet, Huixiong Dai, Ellie Yieh, Nitin K. Ingle |
2020-11-03 |
| 10811250 |
Silicon nitride films with high nitrogen content |
Atashi Basu, Ellie Yieh |
2020-10-20 |
| 10790183 |
Selective oxidation for 3D device isolation |
Shiyu Sun, Keith Tatseun Wong, Kurtis Leschkies, Namsung Kim |
2020-09-29 |
| 10748783 |
Gas delivery module |
Adib Khan, Qiwei Liang, Sultan Malik |
2020-08-18 |
| 10720341 |
Gas delivery system for high pressure processing chamber |
Qiwei Liang, Sean S. Kang, Adib Khan, Ellie Yieh |
2020-07-21 |
| 10714331 |
Method to fabricate thermally stable low K-FinFET spacer |
Mihaela Balseanu, Mei-Yee Shek, Ellie Yieh |
2020-07-14 |
| 10704141 |
In-situ CVD and ALD coating of chamber to control metal contamination |
Sultan Malik, Qiwei Liang, Adib Khan, Maximillian Clemons |
2020-07-07 |
| 10692734 |
Methods of patterning nickel silicide layers on a semiconductor device |
Jong Mun Kim, Chentsau Chris Ying, He Ren, Ellie Yieh |
2020-06-23 |
| 10675581 |
Gas abatement apparatus |
Adib Khan, Qiwei Liang, Sultan Malik, Rafika Smati, Joseph Ng +1 more |
2020-06-09 |
| 10636704 |
Seam-healing method upon supra-atmospheric process in diffusion promoting ambient |
Bencherki Mebarki, Sean S. Kang, Keith Tatseun Wong, He Ren, Mehul Naik +1 more |
2020-04-28 |
| 10590530 |
Gas control in process chamber |
Qiwei Liang, Ellie Yieh |
2020-03-17 |
| 10586707 |
Selective deposition of metal silicides |
Raymond Hung, Namsung Kim, Ellie Yieh, Jong Hun Choi, Christopher Ahles +1 more |
2020-03-10 |
| 10570506 |
Method to improve film quality for PVD carbon with reactive gas and bias power |
Bhargav S. Citla, Jingjing Liu, Zhong Qiang Hua, Chentsau Ying, Ellie Yieh |
2020-02-25 |
| 10566226 |
Multi-cassette carrying case |
Sriskantharajah Thirunavukarasu, Eng Sheng Peh, Arvind Sundarrajan, Avinash Avula, Ellie Yieh +2 more |
2020-02-18 |
| 10566188 |
Method to improve film stability |
Maximillian Clemons, Michel R. Frei, Mahendra Pakala, Mehul Naik, Ellie Yieh |
2020-02-18 |
| 10549324 |
Method and apparatus for backside cleaning of substrates |
Sriskantharajah Thirunavukarasu, Jen Sern Lew, Arvind Sundarrajan |
2020-02-04 |
| 10529603 |
High pressure wafer processing systems and related methods |
Qiwei Liang, Adib Khan, Venkata Ravishankar Kasibhotla, Sultan Malik, Sean S. Kang +1 more |
2020-01-07 |
