Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Gautam Pisharody, Seshadri Ramaswami, Shambhu N. Roy | 2020-12-29 |
| 10665494 | Automated apparatus to temporarily attach substrates to carriers without adhesives for processing | Seshadri Ramaswami, Shay Assaf, Amikam Sade, Andy Constant, Maureen Frances Breiling | 2020-05-26 |
| 10645787 | System and method for providing electrical power to a load | Philippe Ernest, Nicolas Levilly, Yash Veer Singh, Guillermo Garcia Soto | 2020-05-05 |