Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Gautam Pisharody, Seshadri Ramaswami, Niranjan Kumar | 2020-12-29 |
| 10589423 | Robot vision super visor for hybrid homing, positioning and workspace UFO detection enabling industrial robot use for consumer applications | — | 2020-03-17 |