Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879094 | Electrostatic chucking force measurement tool for process chamber carriers | Srinivas D. Nemani, Gautam Pisharody, Shambhu N. Roy, Niranjan Kumar | 2020-12-29 |
| 10665494 | Automated apparatus to temporarily attach substrates to carriers without adhesives for processing | Niranjan Kumar, Shay Assaf, Amikam Sade, Andy Constant, Maureen Frances Breiling | 2020-05-26 |