Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Adolph Miller Allen, Michael W. Stowell, Srinivas D. Nemani, Chentsau Ying +3 more | 2020-12-08 |
| 10858735 | Alignment systems employing actuators providing relative displacement between lid assemblies of process chambers and substrates, and related methods | Danny D. WANG, Jason Michael Lamb, Jun Tae Choi, Rupankar Choudhury, Juan Carlos Rocha-Alvarez | 2020-12-08 |
| 10811257 | Techniques for forming low stress etch-resistant mask using implantation | Rajesh Prasad, Tzu-Yu Liu, Kyu-Ha Shim, Tom Ho Wing Yu, Adolph Miller Allen +3 more | 2020-10-20 |
| 10570506 | Method to improve film quality for PVD carbon with reactive gas and bias power | Bhargav S. Citla, Jingjing Liu, Chentsau Ying, Srinivas D. Nemani, Ellie Yieh | 2020-02-25 |
| 10566177 | Pulse shape controller for sputter sources | Michael W. Stowell, Viachslav Babayan, Jingjing Liu | 2020-02-18 |