Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858727 | High density, low stress amorphous carbon film, and process and equipment for its deposition | Jingjing Liu, Zhong Qiang Hua, Adolph Miller Allen, Michael W. Stowell, Srinivas D. Nemani +3 more | 2020-12-08 |
| 10845715 | Post exposure processing apparatus | Ludovic Godet, Kyle M. Hanson, Robert B. Moore | 2020-11-24 |
| 10754252 | Apparatus for post exposure bake | Kyle M. Hanson, Gregory J. Wilson | 2020-08-25 |
| 10615058 | Apparatus for field guided acid profile control in a photoresist layer | Ludovic Godet, Christine Y Ouyang | 2020-04-07 |
| 10566177 | Pulse shape controller for sputter sources | Michael W. Stowell, Jingjing Liu, Zhong Qiang Hua | 2020-02-18 |