Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861706 | Etch selectivity improved by laser beam | Li-Te Lin | 2020-12-08 |
| 10845704 | Extreme ultraviolet photolithography method with infiltration for enhanced sensitivity and etch resistance | — | 2020-11-24 |
| 10615058 | Apparatus for field guided acid profile control in a photoresist layer | Ludovic Godet, Viachslav Babayan | 2020-04-07 |