Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10811257 | Techniques for forming low stress etch-resistant mask using implantation | Rajesh Prasad, Kyu-Ha Shim, Tom Ho Wing Yu, Zhong Qiang Hua, Adolph Miller Allen +3 more | 2020-10-20 |
| 10562148 | Real time profile control for chemical mechanical polishing | Shih-Haur Shen, Kun Xu | 2020-02-18 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Boguslaw A. Swedek, Ingemar Carlsson, Doyle E. Bennett +2 more | 2020-02-11 |