Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10766119 | Spectra based endpointing for chemical mechanical polishing | Dominic J. Benvegnu, Jeffrey Drue David | 2020-09-08 |
| 10741459 | Inductive monitoring of conductive loops | Wei Lu, Zhefu Wang, Zhihong Wang, Hassan G. Iravani, Dominic J. Benvegnu +2 more | 2020-08-11 |
| 10589397 | Endpoint control of multiple substrate zones of varying thickness in chemical mechanical polishing | Alain Duboust, Wen-Chiang Tu, Shih-Haur Shen, Jimin Zhang, Ingemar Carlsson +4 more | 2020-03-17 |
| 10565701 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Robert D. Tolles, Abraham Ravid | 2020-02-18 |
| 10556315 | Determination of gain for eddy current sensor | Kun Xu, Shih-Haur Shen, Ingemar Carlsson, Doyle E. Bennett, Wen-Chiang Tu +2 more | 2020-02-11 |