Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Todd Egan, Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk +1 more | 2020-11-24 |
| 10565701 | Color imaging for CMP monitoring | Dominic J. Benvegnu, Robert D. Tolles, Boguslaw A. Swedek | 2020-02-18 |