Issued Patents 2020
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10845317 | Particle detection for substrate processing | Mehdi Vaez-Iravani, Samer Banna, Kyle Tantiwong, Gregory L. Kirk, Abraham Ravid +1 more | 2020-11-24 |
| 10816464 | Imaging reflectometer | Guoheng Zhao, Mehdi Vaez-Iravani | 2020-10-27 |
| 10793954 | PECVD process | Nagarajan Rajagopalan, Xinhai Han, Michael Wenyoung Tsiang, Masaki Ogata, Zhijun Jiang +17 more | 2020-10-06 |
| 10736182 | Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers | Matthew J. Busche, Wendell Glenn Boyd, Jr., Gregory L. Kirk, Vijay D. Parkhe, Michael R. Rice +1 more | 2020-08-04 |
| 10710307 | Temperature control for additive manufacturing | David Masayuki Ishikawa, Paul J. Steffas | 2020-07-14 |
| 10695804 | Equipment cleaning apparatus and method | Roman Mostovoy, Suketu Arun Parikh | 2020-06-30 |
| 10527407 | In-situ metrology method for thickness measurement during PECVD processes | Khokan Chandra Paul, Edward W. Budiarto, Mehdi Vaez-Iravani, Jeongmin Lee, Dale R. Du Bois +1 more | 2020-01-07 |