| 10872800 |
Electrostatic chuck assembly for high temperature processes |
— |
2020-12-22 |
| D904640 |
Substrate carrier |
Fred Eric Ruhland, Sumit Subhash Patankar, Daniel Lee Diehl, Mingwei Zhu, Hiroyuki Takahama +1 more |
2020-12-08 |
| 10790180 |
Electrostatic chuck with variable pixelated magnetic field |
Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Ankur Agarwal +2 more |
2020-09-29 |
| 10770270 |
High power electrostatic chuck with aperture-reducing plug in a gas hole |
Jaeyong Cho, Haitao Wang, Kartik Ramaswamy, Chunlei Zhang |
2020-09-08 |
| 10736182 |
Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusers |
Matthew J. Busche, Wendell Glenn Boyd, Jr., Todd Egan, Gregory L. Kirk, Michael R. Rice +1 more |
2020-08-04 |
| 10688750 |
Bonding structure of E chuck to aluminum base configuration |
Roger Alan Lindley |
2020-06-23 |
| 10685861 |
Direct optical heating of substrates through optical guide |
— |
2020-06-16 |
| 10679885 |
Substrate support assembly with deposited surface features |
Wendell Glenn Boyd, Jr., Teng-Fang Kuo, Zhenwen Ding |
2020-06-09 |
| 10622229 |
Electrostatic chuck with independent zone cooling and reduced crosstalk |
Konstantin Makhratchev |
2020-04-14 |
| 10582570 |
Sensor system for multi-zone electrostatic chuck |
— |
2020-03-03 |
| 10557202 |
Method of processing a substrate support assembly |
Wendell Glen Boyd, Jr., Senh Thach |
2020-02-11 |
| 10541171 |
Protective cover for electrostatic chuck |
— |
2020-01-21 |
| 10535544 |
Tunable temperature controlled substrate support assembly |
Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl |
2020-01-14 |
