Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790180 | Electrostatic chuck with variable pixelated magnetic field | Chih-Hsun Hsu, Tza-Jing Gung, Benjamin Schwarz, Shahid Rauf, Vijay D. Parkhe +2 more | 2020-09-29 |
| 10573493 | Inductively coupled plasma apparatus | Valentin N. Todorow, Samer Banna, Zhigang Chen, TSE-CHIANG WANG, Andrew Nguyen +2 more | 2020-02-25 |