Issued Patents 2020
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10855056 | Power and brightness scaling in fiber coupled diode lasers using diodes with optimized beam dimensions | David Martin Hemenway, Manoj Kanskar | 2020-12-01 |
| 10833482 | Diode laser apparatus with FAC lens out-of-plane beam steering | Manoj Kanskar, Shuang Li, Jim Zhang, Mark DeFranza, David Martin Hemenway +2 more | 2020-11-10 |
| 10833474 | CTE-matched silicon-carbide submount with high thermal conductivity contacts | Manoj Kanskar | 2020-11-10 |
| 10825656 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, John Holland, Felix Kozakevich, Kenneth Lucchesi | 2020-11-03 |
| 10809612 | Method of sub resolution assist feature | Junhan Liu | 2020-10-20 |
| 10804129 | Electrostatic chuck assembly incorporation a gasket for distributing RF power to a ceramic embedded electrode | Christopher Kimball, Keith Gaff, Alexander Matyushkin, Keith Comendant | 2020-10-13 |
| 10777968 | Method, system and apparatus for higher order mode suppression | Manoj Kanskar | 2020-09-15 |
| 10755895 | Ion energy control by RF pulse shape | Alexei Marakhtanov, John Holland | 2020-08-25 |
| 10741425 | Helium plug design to reduce arcing | Fangli Hao, Yuehong Fu | 2020-08-11 |
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, James E. Tappan, Jerrel K. Antolik +2 more | 2020-05-26 |
| 10658813 | Low divergence high brightness broad area lasers | Manoj Kanskar | 2020-05-19 |
| 10615006 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-04-07 |
| 10615003 | Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring | Michael C. Kellogg, Alexei Marakhtanov, John Holland, Felix Kozakevich, Kenneth Lucchesi | 2020-04-07 |
| 10580620 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-03-03 |
| 10573493 | Inductively coupled plasma apparatus | Valentin N. Todorow, Samer Banna, Ankur Agarwal, TSE-CHIANG WANG, Andrew Nguyen +2 more | 2020-02-25 |
| 10546728 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-01-28 |
| 10535502 | Symmetric plasma process chamber | James D. Carducci, Hamid Tavassoli, Ajit Balakrishna, Andrew Nguyen, Douglas A. Buchberger, Jr. +3 more | 2020-01-14 |
| 10527930 | Method of sub resolution assist feature | Junhan Liu | 2020-01-07 |