Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10665435 | Chamber with vertical support stem for symmetric conductance and RF delivery | Daniel Arthur Brown, John Holland, Michael C. Kellogg, Jerrel K. Antolik, Ian Kenworthy +2 more | 2020-05-26 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Anthony J. Ricci, Keith Comendant | 2020-04-28 |