Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879053 | Temperature controlled substrate support assembly | Henry Povolny | 2020-12-29 |
| 10636689 | Apparatus for spatial and temporal control of temperature on a substrate | Keith Comendant, James E. Tappan | 2020-04-28 |